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Sputtering Targets - Fluorides

EVOCHEM’s product program offers a wide range of Fluorides. Besides the high purity of these compounds, some fluorides like Magnesium Fluoride and Lanthanum Fluoride are very reliable materials especially suitable for DUV/VUV.

Please provide us with full details on the material, purity, dimensions, any special tolerances and the quantity required. We are pleased to provide a tailor made quotation.

Name Formula Purities
Aluminum Fluoride - Sputtering Target AlF3 4N
Barium Fluoride - Sputtering Target BaF2 3N-3N5
Calcium Fluoride - Sputtering Target CaF2 3N-4N
Cerium Fluoride - Sputtering Target CeF2 3N-4N
Cryolite - Sputtering Target Na3AIF6 4N
Dysprosium Fluoride - Sputtering Target DyF3 3N
Erbium Fluoride - Sputtering Target ErF3 4N
Lanthanum Fluoride - Sputtering Target LaF4 4N
Lead Fluoride - Sputtering Target PbF2 2N5
Lithium Fluoride - Sputtering Target LiF 2N
Praseodymium Fluoride - Sputtering Target PrF3 2N5
Magnesium Fluoride - Sputtering Target MgF2 3N-5N
Neodymium Fluoride - Sputtering Target NdF3 3N
Samarium Fluoride - Sputtering Target SmF3 3N
Sodium Fluoride - Sputtering Target NaF 3N
Strontium Fluoride - Sputtering Target SrF2 3N
Yttrium Fluoride - Sputtering Target YF3 4N
Ytterbium Fluoride - Sputtering Target YbF3 4N-5N


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