EVOCHEM’s product program offers a wide range of Fluorides. Besides the high purity of these compounds, some fluorides like Magnesium Fluoride and Lanthanum Fluoride are very reliable materials especially suitable for DUV/VUV.
Please provide us with full details on the material, purity, dimensions, any special tolerances and the quantity required. We are pleased to provide a tailor made quotation.
| Name | Formula | Purities |
|---|---|---|
| Aluminum Fluoride - Sputtering Target | AlF3 | 4N |
| Barium Fluoride - Sputtering Target | BaF2 | 3N-3N5 |
| Calcium Fluoride - Sputtering Target | CaF2 | 3N-4N |
| Cerium Fluoride - Sputtering Target | CeF2 | 3N-4N |
| Cryolite - Sputtering Target | Na3AIF6 | 4N |
| Dysprosium Fluoride - Sputtering Target | DyF3 | 3N |
| Erbium Fluoride - Sputtering Target | ErF3 | 4N |
| Lanthanum Fluoride - Sputtering Target | LaF4 | 4N |
| Lead Fluoride - Sputtering Target | PbF2 | 2N5 |
| Lithium Fluoride - Sputtering Target | LiF | 2N |
| Praseodymium Fluoride - Sputtering Target | PrF3 | 2N5 |
| Magnesium Fluoride - Sputtering Target | MgF2 | 3N-5N |
| Neodymium Fluoride - Sputtering Target | NdF3 | 3N |
| Samarium Fluoride - Sputtering Target | SmF3 | 3N |
| Sodium Fluoride - Sputtering Target | NaF | 3N |
| Strontium Fluoride - Sputtering Target | SrF2 | 3N |
| Yttrium Fluoride - Sputtering Target | YF3 | 4N |
| Ytterbium Fluoride - Sputtering Target | YbF3 | 4N-5N |
