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Sputtering Targets - Oxides

EVOCHEM’s product program contains a wide range of oxide sputtering targets optimized for the special requirements of Sputtering Processes.

Our oxide sputtering targets offer a better yield, process stability and more design freedom for the optical coating engineer.

Many oxide sputtering targets require bonding. Please contact us if you should gave any questions or if your required sputtertarget material is not listed.

Name Formula Purities
Aluminum Oxide - Sputtering Target Al2O3 2N-4N
Aluminum Zinc Oxide - Sputtering Target AZO 3N
Antimony Oxide - Sputtering Target Sb2O3 3N
Antimony:Tin Dioxide - Sputtering Target ATO 3N5
Barium Titanate - Sputtering Target BaTiO3 2N6-4N
Bismuth Oxide - Sputtering Target Bi2O3 3N
Cerium Oxide - Sputtering Target CeO2 2N-3N5 TREO: 2N min
Copper Oxide - Sputtering Target CuO 3N
Chromium Oxide - Sputtering Target Cr2O3 3N
Dysprosium Oxide - Sputtering Target Dy2O3 4N-5N TREO: 2N5-3N5
Erbium Oxide - Sputtering Target Er2O3 4N-5N TREO: 2N5-3N5
Europium Oxide - Sputtering Target Eu2O3 2N-3N5 TREO: 2N-3N
Gadolinium Oxide - Sputtering Target Gd2O3 3N-4N5 TREO: 2N min
Gallium Zinc Oxide - Sputtering Target GZO 3N
Hafnium Oxide - Sputtering Target HfO2 2N-4N
Holmium Oxide - Sputtering Target Ho2O3 3N-4N5 TREO: 2N min
Indium Oxide - Sputtering Target In2O3 4N
Indium Tin Oxide - Sputtering Target ITO 4N-5N
Indium Zinc Oxid - Sputtering Target IZO 4N-5N
Iron Oxide - Sputtering Target Fe2O3 3N
Iron Oxide - Sputtering Target Fe3O4 3N
Lanthanum Aluminate - Sputtering Target LaAlO3 3N
Lead Titanate - Sputtering Target PbTiO3 3N
Lead Zirconate - Sputtering Target PbZrO3 4N
Lead Zirconate Titanate - Sputtering Target PZT 3N
Lutetium Oxide - Sputtering Target Lu2O3 2N-3N TREO: 2N min
Magnesium Oxide - Sputtering Target MgO 4N
Molybdenum Oxide - Sputtering Target MoO3 2N8-3N
Neodymium Oxide - Sputtering Target Nd2O3 2N-3N TREO: 2N min
Nickel Oxide - Sputtering Target NiO 3N
Niobium Pentoxide - Sputtering Target Nb2O5 2N-5N
Praseodymium Oxide - Sputtering Target Pr6O11 2N-3N TREO: 2N min
Samarium Oxide - Sputtering Target Sm2O3 2N-3N TREO: 2N min
Scandium Oxide - Sputtering Target Sc2O3 4N-5N TREO: 2N5-3N5
Silicon Dioxide - Sputtering Target SiO2 2N-4N
Silicon Monoxide - Sputtering Target SiO 3N-4N
Strontium Titanate - Sputtering Target SrTiO3 3N
Tantalum Pentoxide - Sputtering Target Ta2O5 3N5-4N
Terbium Oxide - Sputtering Target Tb4O7 2N5-5N TREO: 2Nmin
Thulium Oxide - Sputtering Target Tm2O3 2N5-5N TREO: 2Nmin
Titanium Oxide - Sputtering Target TiO 3N
Titanium Oxide - Sputtering Target TiO2 2N-4N
Titanium Oxide - Sputtering Target Ti2O3 3N5
Titanium Oxide - Sputtering Target Ti3O5 2N5-4N
Tungsten Oxide - Sputtering Target WO3 3N
Vanadium Oxide - Sputtering Target V2O5 3N
Yttrium Oxide - Sputtering Target Y2O3 2N-5N TREO: 2N-3N5
Ytterbium Oxide - Sputtering Target Yb2O3 2N-4N TREO: 2N
Zinc Oxide - Sputtering Target ZnO 3N
Zirconium Oxide - Sputtering Target ZrO2 3N-4N
Zirconium Titantium Oxide - Sputtering Target ZrO2 + TiO2 4N
Zirconium Silicon Oxide - Sputtering Target ZrO2 + SiO2 4N
Yttria Stabilized Zirconia - Sputtering Target YSZ 4N


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