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Evaporation Materials - Oxides

EVOCHEM’s product program contains a wide range of Oxides optimized for the special requirements of physical vapor deposition (PVD). Especially our Titanium (TiO2, Ti2O3 and Ti3O5 crystalline) oxides show reduced de-gassing time and a very robust evaporation process.

Besides the common oxides, EVOCHEM also offers special Oxides optimized (e.g. LaTiO3) for high-vacuum coating processes to improve the application of high, medium and low index thin film coatings.

Our special Oxides offer in addition to standard evaporation materials a variety in advantages like better yield, process stability and more design freedom for the optical coating engineer compared to Evaporation Materials currently available in the market.

Name Formula Purities
Aluminum Oxide Al2O3 2N-6N
Antimony Oxide Sb2O3 2N3-3N
Antimony Tin Oxide ATO 3N5
Barium Titanate BaTiO3 2N6-4N
Bismuth Oxide Bi2O3 2N5-3N
Cerium Oxide CeO2 CeO2/TREO:2N-3N min; TREO:2N min
Copper Oxide CuO 3N
Chromium Oxide Cr2O3 3N
Dysprosium Oxide Dy2O3 Dy2O3/TREO:2N-3N min; TREO:2N min
Erbium Oxide Er2O3 ErO3/TREO:2N-3N min; TREO:2N min
Europium Oxide Eu2O3 Eu2O3/TREO:2N-3N min; TREO:2N min
Gadolinium Oxide Gd2O3 Gd2O3/TREO:2N-3N min; TREO:2N min
Gallium Oxide Ga2O3 4N-5N
Germanium Oxide GeO2 4N-5N
Hafnium Oxide HfO2 4N
Holmium Oxide Ho2O3 Ho2O3/TREO:2N-3N min; TREO:2N min
Indium Oxide In2O3 2N-5N
Indium Tin Oxide ITO 4N
Iron Oxide Fe2O3 3N
Iron Oxide Fe3O4 3N
Lanthanum Oxide La2O3 La2O3/TREO:2N-3N min; TREO:2N min
Lanthanum Aluminate LaAlO3 3N
Lead Titanate PbTiO3 3N
Lead Zirconate PbZrO3 4N
Lithium Niobate LiNbO3 4N
Lithium Oxide LiO 3N
Lithium Tantalate LiTaO3 4N
Lutetium Iron Oxide Lu3Fe5O12 3N
Lutetium Oxide Lu2O3 Lu2O3/TREO:2N-3N min; TREO:2N min
Magnesium Oxide MgO 2N5-4N
Manganese Oxide MnO 3N
Magnesium Titanate MgTiO3 3N
Molybdenum Oxide MoO3 2N8-3N
Neodymium Oxide Nd2O3 Nd2O3/TREO:2N-3N min; TREO:2N min
Niobium Pentoxide Nb2O5 3N-4N
Praseodymium Oxide Pr6O11 Pr6O11/TREO:2N-3N min; TREO:2N min
Praseodymium Titanate PrTiO22 3N
Praseodymium Oxide Pr2O3 Pr2O3/TREO:2N-3N min; TREO:2N min
Samarium Oxide Sm2O3 Sm2O3/TREO:2N-3N min;TREO:2N min
Scandium Oxide Sc2O3 Sc2O3/TREO: 4N-5N TREO: 2N5-3N5
Silicon Dioxide SiO2 4N
Silicon Monoxide SiO 3N-4N
Strontium Titanate SrTiO3 3N
Strontium Zirconate SrZrO3 3N
Tantalum Pentoxide Ta2O5 3N5-4N
Terbium Oxide Tb4O7 Tb4O7/TREO:2N5-5N
Tellurium Oxide TeO2 4N-5N
Thulium Oxide Tm2O3 Tm2O3/TREO: 4N-5N TREO: 2N5-3N5
Titanium Dioxide TiO2 3N
Titanium Monoxide TiO 3N
Titanium Pentoxide Ti3O5 3N5-4N
Titanium Trioxide Ti2O3 3N5
Tin Dioxide SnO2 3N-6N
Tin Monoxide SnO 3N-6N
Tungsten oxide WO3 3N
Vanadium Pentoxide V2O5 3N
Yttrium Aluminum Oxide (YAG) Y3Al5O12 4N
Ytterbium Oxide Yb2O3 Yb2O3/TREO: 2N-4N; TREO: 2N min
Yttrium Oxide Y2O3 Re/TREO: 4N-5N     TREO: 2N5-3N5
Zinc Oxide ZnO 3N
Zinc Aluminum Oxide ZnO:Al 3N
Zirconium Oxide ZrO2 3N-4N
Zirconia (Y-Stab) Zr 3N-4N

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